APSC 625 - Device Processing

Fall 3 Prerequisite(s): CHEM 302 or PHYS 313 and MATH 302.

This course is an introduction to the applied science of thin film devices and manufacturing. The course covers vacuum physics and technology, microstructure in thin film nucleation and growth, film deposition methods, surface implantation, and lithography and patterning. Plasma, ion, and neutral atom interactions with solids are described. The fundamentals of the electronic properties of thin films and semiconductor device physics will be presented, including the relationship between processing methods, device damage, and device performance.