APSC 726 - Solid Surfaces and Interfaces

Spring 3 Prerequisite(s): APSC 625.

An extension and continuation of the discussion of physical and chemical deposition, growth, and etching of surfaces. Detailed study of plasma-surface interactions of importance for material processing. Diagnostics of plasma, gas phase reactors and solid surfaces. Discussion of plasma sources and diagnostics including parallel plate, electron cyclotron resonance, helicon, lower-hybrid, and other advanced geometries, and the science and technology of manufacturing uses of surface modification methods.